Industrial Oven Systems and Pre-Heat devices
Heat Chambers are used for gentle, temperature accurate thermal treatment of components in the area of electronic power controller production. Inert-gas atmosphere supports this process.
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This Thermal Chamber is used for thermal treatment of wafer discs for semiconductor production under nitrogen and forming gas atmosphere. Target: electron irradiation and Implantat Ions cause radiation damage at semi-conductor wafer which can be cured with a temperature process (250 °C to 420 °C). This curing process must be under inert-gas atmosphere with a high degree of temperature stability and reproducibility.
This Thermal Chamber is used for thermal treatment of wafer discs for semiconductor production under nitrogen and forming gas atmosphere.
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